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C01800 - SEMI C18 - Specification for Acetic Acid StdTpc-3DS-IC their specifications

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Description

their specifications

org June 2003

This Document applies to cassettes that hold a quantity of rectangular FPD substrates

12-0116 (technical revision)

C01800 - SEMI C18 - Specification for Acetic Acid StdTpc-3DS-IC their specificationsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications. Test methods have been shown to give

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